PVA TePla specializes in wafer growth and processing equipment including CZ Crystal Furnaces, SiC growers, Plasma Systems (single wafer, batch or strip- inline type), Wafer Metrology and Scanning Acoustic Microscopes. Our company serves multiple markets including Power Device, HBLED, MEMS, 3DIC,...
(more)PVA TePla specializes in wafer growth and processing equipment including CZ Crystal Furnaces, SiC growers, Plasma Systems (single wafer, batch or strip- inline type), Wafer Metrology and Scanning Acoustic Microscopes. Our company serves multiple markets including Power Device, HBLED, MEMS, 3DIC, OLED & Solar .
Our unique equipment is used for the following applications:
Front End applications include photo resist ashing & descum, polymer and SU8 or sacrificial layer removal for MEMS devices. Pre-Assembly solutions include stress relief, and Chip Side Healing (CSH) for 3DIC/ultra thin wafer
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